管式等离子体淀积炉
设备名称 Equipment Name
管式等离子体淀积炉 Horizontal PECVD
设备型号 Equipment Model
PD-520
设备用途 Equipment Application
主要用于晶体硅太阳能电池制造中电池片的减反射膜生长，也可用于在电池片的背面沉积钝化膜。
Mainly used for generates highest quality anti-refiective coatings in the production of crystal silicon solar cells, and for deposition of passivation film on the rear side of solar cells.
工艺流程 Process Flow
石墨舟及硅片准备→管内充氮气→进舟→抽真空、压力测试→氨气预清理和检查→管路抽真空、测漏、恒温→预镀膜→镀膜→抽真空、压力测试→清管路、充氮气→退舟
Graphite boat & wafers ready→Nitrogen inlet→Graphite boat load in→Vacuumize, pressure test→Ammonia pre-clean and check→Vacuumize the tube,leak-checking , constant temperature→Pre-coating→Coating→Vacuumize,pressure test→Tube cleaning and Nitrogen inlet→Graphite boat unload
技术特点 Features
1、兼容氮氧化硅PERC技术。
Compatible with SiOxNy PERC process.
2、双水冷密封技术。
Double cooling water flanges sealing technology.
3、专利内加热技术。
Patented internal heating technology.
4、高速平稳整体模组推舟机构。
High-speed integral module boat pushing mechanism.
5、悬浮承载舟技术。
Graphite boat contact-free with quartz tube.
6、自主知识产权MES软件。
MES software with independent intellectual property right.
7、自主开发中央计算机集中控制系统。
Independently developed CCC system.
8、快速镀膜技术。
Fast coating technology.
9、全面的防超温、断偶、撞舟等安全报警保护功能。
Alarm protection for over-heating, thermocouple -break and boat collision.
设备参数 Parameters
